CAS Number
999-97-3
Hexamethyldisilazane
SL Number
CSL-61771
Category
impurity
Molecular Formula
C6H19NSi2
Molecular Weight
161.39
Description
1,1,1,3,3,3-Hexamethyldisilazane; 1,1,1,3,3,3-Hexamethyldisilazane; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine; A 166; A 166 (Silazane); Bis(trimethylsilyl)amine; Di(trimethylsilyl)amine; Dynasylan HMDS; HMD 3; HMDS; HMDS (silazane); HMDS 3; Hexamethyldisilazane; Hexamethyldisilylamine; LS 7150; NSC 93895; OAP; SE 31; SE 31 (silazane); SIH 6110.1; SZ 6079; TSL 8802; TSR 8802; Z 6079
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